The E5061B Option 005 enables the analyzer to measure impedance parameters of electric components such as capacitors, inductors, and resonators.
You can evaluate a broad range of components. This option supports the reflection, series-thru and shunt-thru methods using the S-parameter test port or Gain-Phase test port. These methods are suitable for low-to-middle, middle-to-high, and very low milliohm impedance range respectively.
Keysight 7 mm and 4 TP (4-terminal pair) type test fixtures can be used with E5061B to provide a good repeatable measurement. The 7 mm type fixtures are connected to port 1 with the 16201A terminal adapter.
For more information, see the data sheet for Option 005 Impedance Analysis Function (http://literature.cdn.keysight.com/litweb/pdf/5990-7033EN.pdf).