Measurement Example of a Capacitor (Port 1/Reflection)

This section describes how to measure a Capacitor. In this example, apart from E5061B option 005, 16201A terminal adapter and 16196A test fixture are used. The measurement is performed with 10 pF capacitor, hence, to measure another device under test (DUT), change the measurement conditions to suit accordingly. Prior to the measurement, ensure that the 16201A terminal adapter is connected to the E5061B network analyzer. See Connecting Terminal Adapter.

STEP 1. Setting Measurement Conditions

  1. Preset the E5061B.

    Preset     > OK

  2. Set the trace display settings.

    Display     > Num of Traces > 2

    Display     > Allocate Traces > x2

  3. Set the measurement port to S-Parameter.

    Meas     > Measurement Port > S-Parameter

  4. Set the measurement method to Port 1 Reflection.

    Meas     > Impedance Analysis Menu > Method > Port 1 Refl

  5. Set the measurement type of each trace.

     Select Trace 1 as the active trace.  Meas > Impedance Analysis Menu > |Z|

     Select Trace 2 as the active trace.  Meas > Impedance Analysis Menu > qz

  6. Set the format of the measurement of each trace.

Select Trace 1 as the active trace. Format > Exp Phase > OFF

Select Trace 2 as the active trace. Format > Exp Phase > OFF

  1. Set the sweep setup power.

    Sweep Setup     > Power > -10dBm 

  2. Set the sweep type.

    Sweep Setup     > Sweep Type > Log Freq 

  3. Set the frequency bandwidth.

    Avg     > IF Bandwidth > 100 Hz 

STEP 2. Calibration

Once the measurement condition is set, impedance calibration should be performed. The 16195B calibration kit is required to perform the calibration.

  1. Connect the E4991-60022 OPEN standard to the 16201A terminal adapter (which is connected to Port 1 of E5061B).

Cal > Cal Kit > 16195B

Cal > Calibrate > Impedance Calibration > Open

Once the open calibration is completed, a checkmark is displayed to the left of the Open menu.

  1. Remove the OPEN standard and connect the E4991-60021 SHORT standard to the terminal adapter.

Cal > Calibrate > Impedance Calibration > Short

Once the short calibration is completed, a checkmark is displayed to the left of the Short menu.

  1. In the same way, measure the calibration data for LOAD standard and LOW LOSS C standard. Use 04287-60021 50 W termination LOAD standard and 04287-60022 LOW LOSS Capacitor standard.

Cal > Calibrate > Impedance Calibration > Load

Cal > Calibrate > Impedance Calibration > Low-Loss C

Once the calibrations are completed, a checkmark is displayed to the left of the Load and Low-Loss C menu.

  1. Set the calibration to DONE to save the performed calibration.

STEP 3. Fixture Compensation

As 16196A test fixture is used in this measurement example, fixture compensation should be performed to reduce possible errors induced by the test fixture. Ensure that the insulator assembly used is appropriate with the DUT. Refer to 16196A Test Fixture Operation and Service Manual to learn more about the fixture.

  1. Connect the 16196A test fixture to the terminal adapter and set the electrical length:
    1. Turn the adapter's 7-mm connector in the counterclockwise direction when viewed from above and screw the connection sleeve in fully.
    2. Align the text fixture with the adapter's mount post and 7-mm connector and set it gently in place.
    3. Turn the adapter's 7-mm connector counterclockwise, connecting the bottom of the test fixture with the connector.
    4. Cal > Fixture Compen > Fixture > 16196A
  2. Set the open state by using the open state supplied.
    1. Using the Tweezers, place the open plate on top of the insulator assembly.
    2. Set the open plate with the protruding surface down.
    3. Fit the cap in place with the mark toward the front, and turn it to the right until it is locked.
    4. Cal > Fixture Compen > Compensate > Open
    5. Once the open compensation is completed, a checkmark is displayed to the left of the Open menu.
  3. Set the short state by using the open state supplied.
    1. Remove the cap. Remove the open plate used to measure the open compensation data.
    2. Place the short plate on the insulator assembly with tweezers. Place the rod-shaped protrusion of the short plate downward, and insert it into the DUT insertion hole.
    3. Fit the cap in place with the mark toward the front, and turn it to the right until it is locked.
    4. Cal > Fixture Compen > Compensate > Short
    5. Once the short calibration is completed, a checkmark is displayed to the left of the Short menu.
  4. Set the compensation to DONE to save the performed fixture compensation. Now, the fixture compensation should be automatically turned ON (Cal > Fixture Compen > ON).

STEP 4. Connecting Device Under Test (DUT)

  1. Remove the cap.
  2. Insert the DUT into the insulator hole with tweezers. Use a magnifying glass to check that the DUT is inserted deeply enough into the insulator hole for it to contact the bottom electrode.
  3. Fit the cap in place with the mark toward the front, and turn it to the right until it is locked.
  4. Set the log scale for Trace 1

Select Trace 1 as the active trace.  Scale > Y-Axis > Log

  1. Set the appropriate scale for both traces by executing the auto scale.

Scale > Auto Scale All

STEP 5. Analyzing Measurement Results

This section describes how to use Equivalent Circuit function to analyze the measurement.

  1. Analysis > Equivalent Circuit > Select Circuit > D.

  1. Analysis > Equivalent Circuit > Calculate. The calculated equivalent circuit parameters are displayed in each box of R1, C1 and L1.

  2. Analysis > Equivalent Circuit > Simulate > ON.

  3. Analysis > Equivalent Circuit > Display > ON.

Sample results as shown below:

DUT: 10 pF capacitor

DUT: 100 pF capacitor