When you select Source Only in the Calibration Wizard Setup dialog, the Calibration Wizard is configured to calibrate a single point or multiple points for the source hardware in the following steps:
For source and analyzer multi-point calibration, you need to perform a separate calibration for each (e.g., run the Calibration Wizard for multi-point analyzer to generate a set of corrections files for the analyzer hardware, then do the same for the source hardware.
For best source calibration results, perform an analyzer calibration first, then use the generated analyzer corrections to remove impairments in the analyzer hardware path during source calibration.