Use the following procedure to perform Open compensation using Wizard.
Press Compen Wizard to display the Compensation Wizard.
Execute Open Compensation.

Set the DUT connection terminal of the test fixture to the state in which Short compensation is performed. For information on the procedure to set the Short state, see the Operation Manual for the test fixture to be used.
Click Short.
Click Back to perform Open compensation again.
Click Cancel to stop the compensation and exit the Compensation Wizard.
Click Save to finish the compensation.

For more information on setting the DC resistance (Rdc) limit, please see Setting the Limit for DC Resistance (Rdc).