When you select Analyzer Only in the Calibration Wizard Setup dialog, the Calibration Wizard is configured to calibrate a single point or multiple points for the analyzer hardware in the following steps:
For source and analyzer multi-point calibration, you need to perform a separate calibration for each (e.g., run the Calibration Wizard for multi-point analyzer to generate a set of corrections files for the analyzer hardware, then do the same for the source hardware.