<Setup> Element

The child elements of the <Setup> element configure settings in the Mask Test tab of the Configure Measurements dialog and the Mask Test Scaling dialog as shown by the following figures. The child element <MaskAlignmentOptimize> does not have an equivalent dialog setting. Also, there is no element for the Configure Measurements dialog box's Alignment Timing selection.

Figure. Elements for Mask Test Tab of Configure Measurements Dialog Box

Figure. Elements for Mask Test Scaling Dialog Box

If you do not define a mask setup section in your mask file, the setup data from the last mask that was loaded will be used. This could cause unexpected or erroneous positioning of the mask.

Parent Elements

  • <Mask>

Child Elements

Attributes

None.